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Research on Compound Ultra-Precision Alignment Based on Moiré Signals(PDF)

南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

Issue:
2011年01期
Page:
33-38
Research Field:
Publishing date:

Info

Title:
Research on Compound Ultra-Precision Alignment Based on Moiré Signals
Author(s):
Xu Hui1; Zhang Jinlong1; Liu Jingnan2; UCHIDA Yoshihisa3; Guo Yiqian1
1.School of Electrical and Automation Engineering,Nanjing Normal University,Nanjing 210042,China; 2.Auotomatization College,Southeast University,Nanjing 210096,China; 3.Department of Intelligent Machinery Engineering,Aichi Institute of Technology,Toyoda 470-0392,Japan
Keywords:
diffracting gratings; moiré signals; nanometer alignment; compound control
PACS:
TH74
DOI:
-
Abstract:
The correlation between displacement of double diffracting gratings and the intensity of Moiré signal is studied using optics theory; A mathematical model of precise displacement detection based on the Moiré signal is established． The characteristics of laser Moiré signals are studied by numerical simulation of Moiré signals． The research results are applied to develop ultra-precision positioning stage． The stage can achieve precise position measurement and automatic precision alignment by the 0-th order Moiré signal． In view of the contradiction between high accuracy and long work range of alignment，a novel compound alignment method is developed and reported，in which the coarse and fine alignment are completed only using one pair of narrow pitch grating． By using the two-step alignment，the high alignment accuracy and quick alignment speed are obtained in the wide positioning range． The positioning system is simple in structure by using only one pair of narrow pitch gratings． The experimental result shows the compound alignment can perform positioning accuracy of ± 10nm in ± 500μm positioning range． The approaches are of high value for accelerating the advancement of precision machining technology．

References:

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Last Update: 2013-03-21