|Table of Contents|

Research on Speciality of Ultra-Precision Alignment Based on Moiré Signals(PDF)

南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

Issue:
2015年04期
Page:
9-
Research Field:
电气与电子工程
Publishing date:

Info

Title:
Research on Speciality of Ultra-Precision Alignment Based on Moiré Signals
Author(s):
Fan Yuqi1; Gu Zhihua1; Zhang Jinlong1; Liu Jingnan2; Yoshihisa Uchida3
(1.School of Electrical and Automation Engineering，Nanjing Normal University，Nanjing 210042，China）
(2.School of Automation，Southeast University，Nanjing 210096，China）
（3.Department of Intelligent Machinery Engineering，Aichi Institute of Technology，Toyoda 470-0392，Japan）
Keywords:
Moiré signal; ultra-precision alignment; grating tilted; grating constant; position precision
PACS:
TP932
DOI:
-
Abstract:
A measure to realize ultra-precision position based on Moiré signal is introduced. Firstly a mathematical model is established with respect to the diffraction double gratings and the relative displacement. And then study is conducted about the characteristics of position by using simulation software. Also the impact about position precision made by grating tilted is discussed. The result indicates that the larger tilt angle is the more anchor point offsets. So tilt angle of grating must be controlled in a certain range so that the higher positioning accuracy can be ensured. The relationship between Moiré signals and the laser beam diameter is studied，and it shows that when the laser beam diameter is 11 times more than the grating constant，the signal of　laser stacked gate signals is difficult to be interrupted by interference noise. In this case，higher positioning precision is likely to be easily reached. Addition，the influence that different grating constant made on position accuracy and orientation schedule is analyzed，and then a technology of two-stages compound positioning of coarse and fine grating is raised up，which can make the positioning device realize higher position precision in a larger range. The experimental result shows that the fold grating signal can perform positioning accuracy of ±10 nm.

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Last Update: 2015-12-20