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南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

Issue:

2004年01期

Page:

35-37

Research Field:

Publishing date:

Info

Title:

Application of Laser Moire Sensors to Precision Positioning

Author(s):

Zhang Jinlong ¹; ²

1.College of Electrical and Electronic Engineering, Nanjing Normal Univ, Nanjing 210042, PRC
2. Department of Automat ic Control, Southeast Univ, Nanjing 210096, PRC

Keywords:

Moire sensor;  differential technique;  precision positioning;  industrial control computer

PACS:

TP212

DOI:

-

Abstract:

This paper presents the design for a precise positioning device by employing laser Moire sensors. The device can make precise measuring and positioning. The laser compensating technique and differential grating technique greatly improve the sensitivity to position siginals and positioning precision. The experimental result shows that the device can attain positioning accuracy of ± 0.1μm. The approaches are of high value for accelerating the advancement of integrated circuit manufacturing technology.

References:

[ 1] Alok Kumar Kanjilal. Automatic mask alignment without a microscope [ J] . IEEE Transactions on Instrumentation and Measurement, 1995, 44( 3) : 806~ 809.
[ 2] Liu Jingnan, H Funhashi. Precision position control system using moir? singnals[ J] . Proceedings of the 1995 IEEE IECON, 1995, 2: 968~ 972.
[ 3] Liu Jingnan, H Uchida. Precision Alignment of Pulse Stage Using Moire Signals[ C] . Proceedings of the 41st SICE Annual Conference, 2002, 1: 382~ 385.
[ 4] Uchida Y, Hattori S, Nomura T. An automatic mask alignement technique using moire interference[ J] . Journal of Vacuum Science and Technology, 1987, B5: 244~ 247.
[ 5] G Bouwhuis, Wittelock. Automatic alignment technique for optical projection printing [ J] . IEEE Trans. Electron Devices, 1979, ED- 26( 4) .

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