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The Design of Optical MEMS Pressure Sensor(PDF)

南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

Issue:
2004年04期
Page:
20-24
Research Field:
Publishing date:

Info

Title:
The Design of Optical MEMS Pressure Sensor
Author(s):
LI Ming; WANG Ming; WANG Tingting; NIE Shouping
School of Physical Science and Technology, Nanjing Normal University, Nanjing 210097, China
Keywords:
MEMS;  pressure sensor;  numerical simulation;  interference light intensity
PACS:
TP212
DOI:
-
Abstract:
In this paper, the relation expression between pressure and interference light intensity is illustrated in MEMS pressure sensor, with MEMS pressure sensor explained by adopting Fabry- Perot cavity theory model. Every parameter have been ascertained, which will be dealt with during sensor fabrication through numerical simulation. For example, the radius of cavity is 300 μm、the deepness of cavity is 2. 42 μm, the diaphragm thickness is 23μm. The design presented in the paper has laid the theoretical basis for processing and making MEMS pressure sensor.

References:

[ 1] Wolthuis Roger A, Mitchell Gordon L, Soaski Elric. Deve-l opment of Medical pressure and Temperature Sensors Employing Optical Spectrum Modulation[ J] . IEEE Trans on Biomedical Engineering, 1991, 38( 10) : 974 -981.
[ 2] Chen Haixing, Li Haifeng. Interleaver Design Based Characteristics of Fabry- Perot Cavity[ J] . Acta Optica Sinica, 2002, 23( 1) : 37- 40.
[ 3] Zheng Xiaoping, Liao Yanbiao. A Polarization-Modulated Fiber- optic Sensor for Simultaneous Measurement of Two Parameters[ J] . Acta Optica Sinica, 2001, 21( 1) : 93- 96.
[ 4] Li Weizhuo, Don C Abeysinghe, Boyd Joseph T. Wavelength multiplexing of microelectromechanical system pressure and temperature sensors using fiber Bragg gratings and arrayed waveguide gratings [ J] . Optical Engineering, 2003, 42 ( 2) : 431- 438.
[ 5] Zhou Jie, Dasgupta Samhita, Kobayashi Hiroshi. Optically interrogatedMEMS pressure sensors for propulsion applications [ J] . Optical Engineering , 2001, 40( 4) : 598- 604. [ 6] Bi Weihong. Mathematical Model for Fiber-Optical Non- Symmetrical Fabry- perot Interferometric Cavity [ J] . Acta Optica Sinica, 2000, 20( 7) : 973- 878.
[ 7] 江理平, 唐寿高, 王俊民. 工程弹性力学[M] . 上海: 同济大学出版社, 2002.
[ 8] Chang Chiachen, Sirkis Jim. Multiplexed Optical Fiber Sensors Using a Single Fabry- Perot Resonator for Phase modulation[ J] . Journal of Lightwave Technology, 1996, 14( 7) : 1653- 1663.

Memo

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Last Update: 2013-04-29