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Study of the Optical Interference Technique for the Measurement of the Poisson’s Ratio of MEMS Thin Films(PDF)

南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

Issue:
2010年01期
Page:
89-92
Research Field:
Publishing date:

Info

Title:
Study of the Optical Interference Technique for the Measurement of the Poisson’s Ratio of MEMS Thin Films
Author(s):
Zhao Caifeng; Rong Hua
Jiangsu Province Optoelectronics Technique Key Laboratory,Nanjing Normal University,Nanjing 210097,China
Keywords:
th inMEM S film;  Po issoncs ratio;  in situ m easurem en t;  right ang le cantilever beam
PACS:
TP211
DOI:
-
Abstract:
In th is study, a m ethod to m easure the Po issoncs ratio o f thin MEMS film accord ing to optical interference technical is proposed. The me thod m akes use o f a righ t ang le cantileve r beam as test structure, applies vo ltage betw een the top electrode and the bo ttom e lectrode, under the function o f the electrostatic force, the first pa rt of the can tilever beam wh ich is connected w ith the ancho rw ill becom e de form ed w ith bend ing and torsion. First, m easure the deform ation w ithM irau interfe rence instrum ent, then separate the bend ing and torsion, figure ou t the Po issoncs ratio o f th inM EMS film, and ve rify them ethod w ith the so ftw are o f Covento rW are. The resu lts show that the accuracy o f the m ethod is very h igh.

References:

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Last Update: 2013-04-02