[1]张金龙.激光莫尔传感器在精密定位中的应用[J].南京师范大学学报(工程技术版),2004,04(01):035-37.
　Zhang Jinlong,Application of Laser Moire Sensors to Precision Positioning[J].Journal of Nanjing Normal University(Engineering and Technology),2004,04(01):035-37.
点击复制

激光莫尔传感器在精密定位中的应用
分享到：

南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

卷:
04卷
期数:
2004年01期
页码:
035-37
栏目:
出版日期:
2004-03-30

文章信息/Info

Title:
Application of Laser Moire Sensors to Precision Positioning
作者:
张金龙1;  2
1. 南京师范大学电气与电子工程学院, 210042, 南京; 2. 东南大学自动控制系, 210096, 南京
Author(s):
Zhang Jinlong 1; 2
1.College of Electrical and Electronic Engineering, Nanjing Normal Univ, Nanjing 210042, PRC
2. Department of Automat ic Control, Southeast Univ, Nanjing 210096, PRC
关键词:
莫尔传感器;  差动技术;  精密定位;  工业控制计算机
Keywords:
Moire sensor;  differential technique;  precision positioning;  industrial control computer
分类号:
TP212
摘要:
应用激光莫尔信号传感器设计了一套精密定位装置 ,可实现高精度位置检测及精密自动定位 ;系统采用的激光补偿技术及差动光栅技术 ,极大地提高了位置检测信号的灵敏度与定位精度 .实验结果表明 ,精密定位装置可获得± 0 1μm的定位精度 ,对集成电路制造技术等精密加工工程领域具有重要的实用价值
Abstract:
This paper presents the design for a precise positioning device by employing laser Moire sensors. The device can make precise measuring and positioning. The laser compensating technique and differential grating technique greatly improve the sensitivity to position siginals and positioning precision. The experimental result shows that the device can attain positioning accuracy of ± 0.1μm. The approaches are of high value for accelerating the advancement of integrated circuit manufacturing technology.

参考文献/References:

[ 1] Alok Kumar Kanjilal. Automatic mask alignment without a microscope [ J] . IEEE Transactions on Instrumentation and Measurement, 1995, 44( 3) : 806~ 809.
[ 2] Liu Jingnan, H Funhashi. Precision position control system using moir? singnals[ J] . Proceedings of the 1995 IEEE IECON, 1995, 2: 968~ 972.
[ 3] Liu Jingnan, H Uchida. Precision Alignment of Pulse Stage Using Moire Signals[ C] . Proceedings of the 41st SICE Annual Conference, 2002, 1: 382~ 385.
[ 4] Uchida Y, Hattori S, Nomura T. An automatic mask alignement technique using moire interference[ J] . Journal of Vacuum Science and Technology, 1987, B5: 244~ 247.
[ 5] G Bouwhuis, Wittelock. Automatic alignment technique for optical projection printing [ J] . IEEE Trans. Electron Devices, 1979, ED- 26( 4) .

备注/Memo

备注/Memo:
作者简介: 张金龙, 博士研究生, 副教授, 主要从事自动化测试技术. E-mail: zjlo310@163. com.
更新日期/Last Update: 2013-04-29