[1]徐慧,张金龙,刘京南,等.基于莫尔信号的超精密复合定位研究[J].南京师范大学学报(工程技术版),2011,11(01):033-38.
　Xu Hui,Zhang Jinlong,Liu Jingnan,et al.Research on Compound Ultra-Precision Alignment Based on Moiré Signals[J].Journal of Nanjing Normal University(Engineering and Technology),2011,11(01):033-38.
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基于莫尔信号的超精密复合定位研究
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南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

卷:
11卷
期数:
2011年01期
页码:
033-38
栏目:
出版日期:
2011-03-09

文章信息/Info

Title:
Research on Compound Ultra-Precision Alignment Based on Moiré Signals
作者:
徐慧1; 张金龙1; 刘京南2; 内田敬久3; 郭怡倩1
1． 南京师范大学电气与自动化工程学院，江苏南京210042; 2． 东南大学自动化学院，江苏南京210096; 3． 日本爱知工业大学智能机械工学科，丰田市470-0392
Author(s):
Xu Hui1; Zhang Jinlong1; Liu Jingnan2; UCHIDA Yoshihisa3; Guo Yiqian1
1.School of Electrical and Automation Engineering,Nanjing Normal University,Nanjing 210042,China; 2.Auotomatization College,Southeast University,Nanjing 210096,China; 3.Department of Intelligent Machinery Engineering,Aichi Institute of Technology,Toyoda 470-0392,Japan
关键词:
衍射光栅; 莫尔信号; 纳米定位; 复合控制
Keywords:
diffracting gratings; moiré signals; nanometer alignment; compound control
分类号:
TH74
摘要:
应用光学理论研究了透射式激光莫尔信号的位移特性,建立了衍射莫尔信号强度与对应位移的数学模型,并通过计算机仿真对莫尔信号的位移特性进行了研究.在此基础上设计了一套基于激光莫尔信号的超精密定位系统,系统取透射的零次莫尔信号为控制信号,由微机控制实现高精度位置检测及精密自动定位.针对精密定位高精度与大行程之间的矛盾,提出了一种利用一对细光栅实现复合定位的解决方法,通过粗定位和精定位相结合的两段式复合定位,可保证在较大的信号捕捉范围内,实现高速高精度定位.由于系统仅使用一对光栅,结构简单、可靠性高.实验结果表明,基于一对衍射细光栅的复合式精密定位可在±500μm信号捕捉范围获得±10nm的定位精度,对精密加工工程领域具有重要的实用价值.
Abstract:
The correlation between displacement of double diffracting gratings and the intensity of Moiré signal is studied using optics theory; A mathematical model of precise displacement detection based on the Moiré signal is established． The characteristics of laser Moiré signals are studied by numerical simulation of Moiré signals． The research results are applied to develop ultra-precision positioning stage． The stage can achieve precise position measurement and automatic precision alignment by the 0-th order Moiré signal． In view of the contradiction between high accuracy and long work range of alignment，a novel compound alignment method is developed and reported，in which the coarse and fine alignment are completed only using one pair of narrow pitch grating． By using the two-step alignment，the high alignment accuracy and quick alignment speed are obtained in the wide positioning range． The positioning system is simple in structure by using only one pair of narrow pitch gratings． The experimental result shows the compound alignment can perform positioning accuracy of ± 10nm in ± 500μm positioning range． The approaches are of high value for accelerating the advancement of precision machining technology．

参考文献/References:

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备注/Memo

备注/Memo:
基金项目: 国家863 计划项目( 2005AA303610) 、江苏省自然科学基金项目( BK2009406) ．通讯联系人: 张金龙，博士，副教授，研究方向: 超精密定位技术． E-mail: ZJL0310@163． Com
更新日期/Last Update: 2013-03-21