[1]倪小琦,王鸣,陈绪兴,等.光纤MEMS法布里-珀罗压力传感器的准分布式测量[J].南京师范大学学报(工程技术版),2009,09(04):082-86.
　Ni Xiaoqi,Wang Ming,Chen Xuxing,et al.Quasi-Distributed Measurement of Optical Fiber MEMS Fabry-Perot Pressure Sensors[J].Journal of Nanjing Normal University(Engineering and Technology),2009,09(04):082-86.
点击复制

光纤MEMS法布里-珀罗压力传感器的准分布式测量
分享到：

南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

卷:
09卷
期数:
2009年04期
页码:
082-86
栏目:
出版日期:
2009-12-30

文章信息/Info

Title:
Quasi-Distributed Measurement of Optical Fiber MEMS Fabry-Perot Pressure Sensors
作者:
倪小琦;王鸣;陈绪兴;戴霞娟;
南京师范大学物理科学与技术学院, 江苏南京210097
Author(s):
Ni Xiaoqi; Wang Ming; Chen Xuxing; Dai Xiajuan
School of Physical Science and Technology,Nanjing Normal University,Nanjing 210097,China
关键词:
导波与光纤光学;  FP压力传感器;  傅立叶解调法;  准分布式测量
Keywords:
guided w ave and fiber op tics;  FP pressure sensor;  Four ier demodu lation m ethod;  quas-i d istr ibuted measurement
分类号:
TP212.14
摘要:
提出了一种基于傅立叶解调法的空分复用系统,实现了光纤微机电系统(M icroE lectroM echan ical System,MEMS)法-珀(FP)压力传感器的准分布式测量.传感器基于FP腔干涉的原理,采用MEMS技术加工制作,用傅立叶方法解调干涉信号,用光开关实现传感器复用.理论分析与实验验证了传感器解调和复用的基本原理.结果表明,该系统具有好的线性、灵敏度、精度和重复性,响应速度快,复用的传感器间无明显串扰,系统复用能力取决于光开关的通道数.
Abstract:
A m ultiplex ing schem e based on Fourier dem odu lation m e thod is presented in this paper, w hich m akes quas-i d istr ibu ted measurem en t of optica l fiberMEM S Fabry-Pero t ( FP) pressure sensors poss ible. Based on FP interferom etry, the sensors are fabr icated by emp loy ing the m ic roe lec trom echan ica l system (M EMS ) techn iques and interroga ted w ith Fourier dem odu la tion m ethod. An optical sw itch is used to mu ltip lex the senso rs. The demodu lation and mu ltiplex ing princ ip le a re theoretica lly ana lyzed and expe rim en tally ver ified. The exper im enta l results dem onstrate that the system has reasonable linearity, sensitiv ity, prec is ion, repetition and fast response. There is no observab le crossta lk am ong the mu ltiplex ing sensors and the system. s capac ity depends on channe ls o f the optical sw itch.

参考文献/References:

[ 1] Don C Abeys inghe, Samh ita Dasgupta, Joseph T Boyd, e t a .l A novelMEMS pressure sensor fab rica ted on an optical fiber
[ J] . IEEE Pho ton ics Techno logy Le tters, 2001, 13( 9) : 993-995.
[ 2] Zhou J ie, Sam hita Dasgupta, H iroshi Kobayash,i et a .l Optica lly in terrogatedMEM S pressure senso rs fo r propulsion app lications[
J]. Opt Eng, 2001, 40( 4): 598- 604.
[ 3] Y asukazu Sano, Toshihiko Yoshino. Fast op tica lwave leng th in terrogator em ploy ing a rrayed wavegu ide grating for d istributed f-i
ber Bragg grating sensors [ J]. Journa l o f L ightwave Techno logy, 2003, 21( 1) : 132-139.
[ 4] No rm an D C C, W ebb D J, Pechstedt R D, et a.l Ex tended range interroga tion o fw aveleng th div ision mu ltiplex ed fiber B ragg
g ra ting senso rs us ing arrayed w avegu ide g ra ting [ J] . E lectronics Letters, 2003, 39( 24) : online No. 20031093.
[ 5] 陈伟民, 朱永, 唐晓初, 等. 光纤法布里-珀罗传感器串连复用的傅立叶变换解调方法初探[ J]. 光学学报, 2004, 24
( 11): 1 481-1 486.
ChenWe im in, Zhu Yong, Tang X iaochu, et a.l Study on the seria lm ultip les o f optica l fiber Fabry-Perot strain serso rs w ith
Fourior transfo rm [ J]. Ac taOptica S in ica, 2004, 24( 11) : 1 481-1 486. ( in Ch inese)
[ 6] 周昌学, 饶云江, 朱涛. 光纤菲佐应变传感器的波分频分复用方法[ J] . 光学学报, 2005, 25( 11): 1 472-1 476.
Zhou Changxue, Rao Yunjiang, Zhu Tao. SFDW /CWDM of fiber-optic F izeau stra in sersors[ J]. A ctaOptica S in ica, 2005, 25
( 11): 1 472-1 476. ( in Chinese)

备注/Memo

备注/Memo:
基金项目: 江苏省科技支撑计划(工业部分) ( BE 2008138)资助项目.
通讯联系人: 倪小琦, 硕士, 助教. 研究方向: 光纤传感. E-m ail:n ix iaoqi@n jnu. edu. cn
更新日期/Last Update: 2013-04-23