参考文献/References:
[ 1] Wong H S P. Design and performance considerations for sub-0. 1μm doube-l gate SOI MOSFETs[ A] . International Electronic Device Meeting, 1994.
[ 2] Wong H S P, Chan K K, Taur Y. Sel-f aligned doube-l gate MOSFET with a 25 nm thick channel[ A] . International Electronic Device Meeting, 1997. 427~ 430.
[ 3] Wong H S P, Frank D J, Solomon P M. Device design considerations for double-gate, ground plane, and single- gated ultra- thin SOI MOSFETs at the 25 nm channel length[ A] . International Electronic Device Meeting, 1998. 407~ 410.