[1]李明,王鸣,王婷婷,等.光纤微机电压力传感器的设计[J].南京师范大学学报(工程技术版),2004,04(04):020-24.
　LI Ming,WANG Ming,WANG Tingting,et al.The Design of Optical MEMS Pressure Sensor[J].Journal of Nanjing Normal University(Engineering and Technology),2004,04(04):020-24.
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光纤微机电压力传感器的设计
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南京师范大学学报（工程技术版）[ISSN:1006-6977/CN:61-1281/TN]

卷:
04卷
期数:
2004年04期
页码:
020-24
栏目:
出版日期:
2004-12-30

文章信息/Info

Title:
The Design of Optical MEMS Pressure Sensor
作者:
李明; 王鸣; 王婷婷; 聂守平
南京师范大学物理科学与技术学院, 江苏南京210097
Author(s):
LI Ming; WANG Ming; WANG Tingting; NIE Shouping
School of Physical Science and Technology, Nanjing Normal University, Nanjing 210097, China
关键词:
集成光路;  光纤MEMS压力传感器;  数值模拟;  干涉光强
Keywords:
MEMS;  pressure sensor;  numerical simulation;  interference light intensity
分类号:
TP212
摘要:
设计了一种基于微机电系统 (MEMS)的光纤压力传感器 ,证明了光纤MEMS压力传感器在工作状态下可以由法布里珀罗腔的理论模型进行解释 .推导出光纤MEMS压力传感器中硅横膈膜受到的压力与干涉光强的关系表达式 .并且对光纤MEMS压力传感器的模型进行数值模拟 ,得到了传感器制作过程中涉及到的各个物理量的取值 ,其中腔体半径为 3 0 0 μm、腔体深度为 2 .42 μm、硅横膈膜厚度为 2 3 μm .该设计为光纤MEMS压力传感器的加工和制作提供了理论基础 .
Abstract:
In this paper, the relation expression between pressure and interference light intensity is illustrated in MEMS pressure sensor, with MEMS pressure sensor explained by adopting Fabry- Perot cavity theory model. Every parameter have been ascertained, which will be dealt with during sensor fabrication through numerical simulation. For example, the radius of cavity is 300 μm、the deepness of cavity is 2. 42 μm, the diaphragm thickness is 23μm. The design presented in the paper has laid the theoretical basis for processing and making MEMS pressure sensor.

参考文献/References:

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[ 5] Zhou Jie, Dasgupta Samhita, Kobayashi Hiroshi. Optically interrogatedMEMS pressure sensors for propulsion applications [ J] . Optical Engineering , 2001, 40( 4) : 598- 604. [ 6] Bi Weihong. Mathematical Model for Fiber-Optical Non- Symmetrical Fabry- perot Interferometric Cavity [ J] . Acta Optica Sinica, 2000, 20( 7) : 973- 878.
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备注/Memo

备注/Memo:
基金项目: 江苏省高新技术基金资助项目( BG2003024) 和南京师范大学学生基金资助项目( 2004XK013) .
作者简介: 李明( 1980- ) , 硕士研究生, 主要从事光电子技术与激光应用的学习与研究. E-mail: chinamems@ vip. sina. com
通讯联系人: 王鸣( 1950- ) , 教授, 主要从事光电子技术与激光应用的研究. E-mail:wangming@pine. njnu. edu. cn
更新日期/Last Update: 2013-04-29